Interface a prototyping experiences paving the way to e-manufacturing

Author

Wohlwend, Harvey ; Fulton, Steve

Author_Institution

ISMI, Austin, TX

fYear

2005

fDate

11-12 April 2005

Firstpage

86

Lastpage

89

Abstract

Pressure to increase semiconductor manufacturing productivity remains intense. Because productivity gains resulting from larger wafers, smaller device features, and 90% and greater yields are now assumed, equipment utilization and manufacturing effectiveness have become target areas for further improvement. IC makers believe that productivity can be improved significantly by additional equipment and factory data. As a result, ISMI e-manufacturing activities have focused on the acquisition of data to enable factories capable of data-driven, real-time, automated decision-making. IC makers need these types of factories to support shrinking feature sizes and to increase overall factory productivity. This article describes results from prototypes and early production versions of equipment using the new Interface A data port

Keywords

data acquisition; decision making; integrated circuit manufacture; production engineering computing; production equipment; production facilities; prototypes; IC makers; ISMI; International SEMATECH Manufacturing Initiative; automated decision-making; e-manufacturing; equipment data acquisition; factory data; factory productivity; feature sizes; prototyping experiences; semiconductor manufacturing productivity; Acceleration; Automatic control; Communication system control; Data acquisition; Decision making; Manufacturing; Production facilities; Productivity; Prototypes; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI

Conference_Location

Munich

Print_ISBN

0-7803-8997-2

Type

conf

DOI

10.1109/ASMC.2005.1438772

Filename

1438772