Title :
Simplified transmission photo-thermal radiometry for thermal diffusivity measurements in thin metal layers
Author :
Yan Laijun ; Gao Chunming ; Ma Xingchen ; Zhao Binxing
Author_Institution :
Sch. of Optoelectron. Inf., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
Photo-thermal radiometry (PTR) technique in frequency domain is well known as an effective mean of non-destructive infrared detection. Conventional PTR technique is developed for thermal diffusivity determinations of thin metal layers. In this paper, a simplified transmission PTR technique for accurate thermal diffusivity measurement of thin metal layer is presented. The thermal diffusivity of Cu (10μm) and Al (27μm) determined by the simplified transmission PTR system is 83.13mm2/s and 78.02mm2/s, respectively. The goodness of fit analysis shows that the simplified transmission PTR system has high reliability and accuracy.
Keywords :
aluminium; copper; infrared detectors; metallic thin films; nondestructive testing; radiometry; thermal diffusivity; Al; Cu; frequency domain; nondestructive infrared detection; simplified transmission photothermal radiometry; thermal diffusivity measurements; thin metal layers; Educational institutions; Integrated optics; Materials; Measurement by laser beam; Metals; Radiometry; Semiconductor device measurement; goodness of fit analysis; photo-thermal radiometry; thermal diffusivity;
Conference_Titel :
Electronic Measurement & Instruments (ICEMI), 2013 IEEE 11th International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4799-0757-1
DOI :
10.1109/ICEMI.2013.6743152
