• DocumentCode
    3321998
  • Title

    Realization of a Novel Region Creation in Web-based Mask Design Platform

  • Author

    Mingcong Fan ; Lianguan Shen ; Xiaodong Wang ; Mujun Li ; Jinjin Zheng

  • Author_Institution
    China Univ. of Sci. & Technol., Hefei
  • fYear
    2007
  • fDate
    8-11 July 2007
  • Firstpage
    470
  • Lastpage
    475
  • Abstract
    A novel region profile construction method for mask pattern design is proposed. The algorithm is realized in our own developed web-based mask design platform. Comparing with traditional region creation approach, the area-oriented region creation algorithm is more intelligent, convenient and flexible for designer´s operation. The design result can be shared and operated cooperatively online.
  • Keywords
    Internet; circuit CAD; integrated circuit design; masks; Web-based mask design platform; area-oriented region creation algorithm; integrated circuits; mask pattern design; region profile construction method; Algorithm design and analysis; Cities and towns; Computer aided manufacturing; Databases; Design automation; Instruments; Integrated circuit technology; Lithography; Machinery; Micromechanical devices; Collaborative Design; Interactive Operation; Mask Design; Region Creation; Web CAD;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Acquisition, 2007. ICIA '07. International Conference on
  • Conference_Location
    Seogwipo-si
  • Print_ISBN
    1-4244-1219-6
  • Electronic_ISBN
    1-4244-1220-X
  • Type

    conf

  • DOI
    10.1109/ICIA.2007.4295779
  • Filename
    4295779