Title :
Realization of a Novel Region Creation in Web-based Mask Design Platform
Author :
Mingcong Fan ; Lianguan Shen ; Xiaodong Wang ; Mujun Li ; Jinjin Zheng
Author_Institution :
China Univ. of Sci. & Technol., Hefei
Abstract :
A novel region profile construction method for mask pattern design is proposed. The algorithm is realized in our own developed web-based mask design platform. Comparing with traditional region creation approach, the area-oriented region creation algorithm is more intelligent, convenient and flexible for designer´s operation. The design result can be shared and operated cooperatively online.
Keywords :
Internet; circuit CAD; integrated circuit design; masks; Web-based mask design platform; area-oriented region creation algorithm; integrated circuits; mask pattern design; region profile construction method; Algorithm design and analysis; Cities and towns; Computer aided manufacturing; Databases; Design automation; Instruments; Integrated circuit technology; Lithography; Machinery; Micromechanical devices; Collaborative Design; Interactive Operation; Mask Design; Region Creation; Web CAD;
Conference_Titel :
Information Acquisition, 2007. ICIA '07. International Conference on
Conference_Location :
Seogwipo-si
Print_ISBN :
1-4244-1219-6
Electronic_ISBN :
1-4244-1220-X
DOI :
10.1109/ICIA.2007.4295779
