Title :
Moisture effects on purifier/chemical filter materials
Author :
Alvarez, Dan, Jr. ; Rotter, Joseph ; Scoggins, Troy
Author_Institution :
Res. & Dev., Mykrolis Corp., San Diego, CA
Abstract :
A method was developed to measure hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a gas chromatograph and flame ionization detector (GC/FID).1 This method was used to measure purifier siloxane removal efficiencies from air under dry and humid conditions. Several media types were examined: activated alumina (AA), activated carbon (AC), bead-shaped activated carbon (BAC), a proprietary inorganic material (PIM) and a zeolite (ZEO). Under dry conditions, all five materials removed the siloxane challenge to below 1 ppt. The AC material had a removal efficiency of 286 ppt under humid conditions. The AA, BAC, PIM and ZEO removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached, the materials were regenerated and siloxane removal efficiencies were reexamined. Under humid conditions only the AA, PIM and ZEO materials were regenerable to below 1 ppt efficiency levels
Keywords :
aluminium compounds; carbon; chromatography; contamination; filtration; integrated circuit manufacture; organic compounds; purification; zeolites; Al2O3; C; activated alumina; activated carbon; bead-shaped activated carbon; chemical filter materials; flame ionization detector; gas chromatograph; humid conditions; hydrocarbons; media saturation; moisture effects; part-per-trillion concentration level; proprietary inorganic material; purifier material; purifier siloxane removal efficiencies; zeolite; Chemicals; Electrostatics; Filters; Gases; Humidity measurement; Hydrocarbons; Inorganic materials; Moisture; Pollution measurement; Purification;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI
Conference_Location :
Munich
Print_ISBN :
0-7803-8997-2
DOI :
10.1109/ASMC.2005.1438786
