Long-term charge stability of silicon dioxide electrets

In this paper, we report the investigation of silicon dioxide electrets by using plasma chemical vapor deposition (PCVD) and thermal oxidation process. It is shown that by using a proper process, long-term charge stability can be obtained, even at elevated temperatures. Physical studies will be described, in which the charge stability is correlated to Thermally Stimulated Current (TSC) measurements and to Electron Spin Resonance (ESR) analysis. Some intrinsic differences have been observed between materials with different long-term charge stability