DocumentCode
3322530
Title
Lot identification, lot location and information distribution using radio frequency and ultrasonic signals
Author
Dierkes, Markus ; Eisen, Stephan ; Fischer, Hanspeter ; Schrödel, Ralf
fYear
2005
fDate
11-12 April 2005
Firstpage
280
Lastpage
282
Abstract
A new lot location and identification system (LotTrack) is presented. It shows, how the combination of radio frequency and ultrasonic signals enriches flexible wafer fabrication and leads to improved logistics. LotTrack localizes wafer boxes autonomously on the shop floor with an accuracy of 30 cm and displays any relevant information for operation. In this way the system turns into an alternative to more expensive and inflexible transport systems
Keywords
integrated circuit manufacture; logistics; radiofrequency identification; ultrasonic applications; LotTrack; flexible wafer fabrication; inflexible transport systems; information distribution; logistics; lot location and identification system; radio frequency signals; shop floor; ultrasonic signals; wafer boxes; Communication system control; Control systems; Displays; Logistics; Production; RF signals; Radio frequency; Radio transmitters; Radiofrequency identification; Signal processing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI
Conference_Location
Munich
Print_ISBN
0-7803-8997-2
Type
conf
DOI
10.1109/ASMC.2005.1438810
Filename
1438810
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