Title :
Lot identification, lot location and information distribution using radio frequency and ultrasonic signals
Author :
Dierkes, Markus ; Eisen, Stephan ; Fischer, Hanspeter ; Schrödel, Ralf
Abstract :
A new lot location and identification system (LotTrack) is presented. It shows, how the combination of radio frequency and ultrasonic signals enriches flexible wafer fabrication and leads to improved logistics. LotTrack localizes wafer boxes autonomously on the shop floor with an accuracy of 30 cm and displays any relevant information for operation. In this way the system turns into an alternative to more expensive and inflexible transport systems
Keywords :
integrated circuit manufacture; logistics; radiofrequency identification; ultrasonic applications; LotTrack; flexible wafer fabrication; inflexible transport systems; information distribution; logistics; lot location and identification system; radio frequency signals; shop floor; ultrasonic signals; wafer boxes; Communication system control; Control systems; Displays; Logistics; Production; RF signals; Radio frequency; Radio transmitters; Radiofrequency identification; Signal processing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI
Conference_Location :
Munich
Print_ISBN :
0-7803-8997-2
DOI :
10.1109/ASMC.2005.1438810
