Title :
Thin-film functional materials for portable microwave systems
Author :
Laister, A.J. ; James, C. ; Robertson, Ian D. ; Milne, S.J. ; Miles, R.E.
Author_Institution :
Inst. of Microwaves & Photonics, Univ. of Leeds, Leeds, UK
Abstract :
The presentation will focus on the exploratory work performed by the University of Leeds on behalf of the Flagship Consortium. The characterisation and patterning of thin-film Lead Zirconium Titanate (PZT) suitable for high-frequency RF systems will be discussed, and experimental results will be presented. A sub-wavelength parallel-plate capacitor configuration with laser-drilled micro via´s was fabricated using a single-mask photolithography method, and Sιι measurements were taken directly from the structure for a frequency range from 100MHz to 67GHz. A lumped-element model with fringing-field compensation was used to de-embed the material´s frequency-dependent relative permittivity and loss tangent values.
Keywords :
microwave materials; thin films; PZT; frequency-dependent relative permittivity; fringing-field compensation; high-frequency RF systems; laser-drilled micro via; lumped-element model; portable microwave systems; single-mask photolithography method; sub-wavelength parallel-plate capacitor configuration; thin-film functional materials;
Conference_Titel :
Passive RF and Microwave Components, IET Seminar on
Conference_Location :
Birmingham
DOI :
10.1049/ic.2010.0175