Title :
Laser Cleaning Of Surface Contaminants
Author :
Tam, A.C. ; Hee K. Park ; Grigoropoulos, Costas P.
Author_Institution :
IBM Almaden Research Center, 650 Harry Road, San Jose, California
Keywords :
Acoustic beams; Acoustic scattering; Cleaning; Laser beams; Laser modes; Optical scattering; Pulsed laser deposition; Reflectivity; Surface contamination; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
DOI :
10.1109/CLEOPR.1997.615195