DocumentCode
3322774
Title
Laser Cleaning Of Surface Contaminants
Author
Tam, A.C. ; Hee K. Park ; Grigoropoulos, Costas P.
Author_Institution
IBM Almaden Research Center, 650 Harry Road, San Jose, California
fYear
1997
fDate
14-18 July 1997
Firstpage
295
Lastpage
296
Keywords
Acoustic beams; Acoustic scattering; Cleaning; Laser beams; Laser modes; Optical scattering; Pulsed laser deposition; Reflectivity; Surface contamination; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-3889-8
Type
conf
DOI
10.1109/CLEOPR.1997.615195
Filename
615195
Link To Document