Title :
High resolution retarding field analyser
Author :
Johnson, S.D. ; El-Gomati, M.M. ; Mahadevan, J. ; Enloe, L.
Author_Institution :
Dept. of Electron., York Univ., UK
Abstract :
A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained
Keywords :
electron optics; electrostatic devices; micromachining; particle beam diagnostics; vacuum microelectronics; electron optic devices; electrostatic charged particle energy analyser; high resolution retarding field analyser; length to diameter ratio; microfabrication; miniaturisation; optimum resolution; silicon micromachining techniques; Acceleration; Apertures; Electron optics; Electrostatic analysis; Energy resolution; Laboratories; Large-scale systems; Optical filters; Silicon; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939628
