DocumentCode
3326244
Title
High resolution retarding field analyser
Author
Johnson, S.D. ; El-Gomati, M.M. ; Mahadevan, J. ; Enloe, L.
Author_Institution
Dept. of Electron., York Univ., UK
fYear
2001
fDate
2001
Firstpage
11
Lastpage
12
Abstract
A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained
Keywords
electron optics; electrostatic devices; micromachining; particle beam diagnostics; vacuum microelectronics; electron optic devices; electrostatic charged particle energy analyser; high resolution retarding field analyser; length to diameter ratio; microfabrication; miniaturisation; optimum resolution; silicon micromachining techniques; Acceleration; Apertures; Electron optics; Electrostatic analysis; Energy resolution; Laboratories; Large-scale systems; Optical filters; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939628
Filename
939628
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