Title :
Adaptive MOEMS applications in telemetry and multi-spectral imaging
Author_Institution :
Electr. & Comput. Eng., Univ. of Waterloo, Waterloo, ON
Abstract :
Micro-opto-electro-mechanical systems (MOEMS) are finding increased uses in instrumentation and many imaging applications. The required complex optical manipulations of laser beams use expensive, sub-optimal and inaccurate optical components (lenses, mirrors, spectral filters, etc.). MOEMS components can be introduced instead of (or in addition to) these optical path elements. Such MEMS devices can significantly improve the overall performance of these instruments. We propose MOEMS elements arrays to act as adaptive and corrective optics. Alternatively, the MOEMS elements can dynamically vary the optical path structure. Initial prototypes have been built. Sample applications are introduced. They span multi-spectral medical imaging and laser radar telemetry.
Keywords :
laser beams; laser mirrors; micro-optomechanical devices; optical elements; optical images; telemetry; MEMS devices; adaptive MOEMS applications; complex optical manipulations; laser beams; laser radar telemetry; microoptoelectromechanical systems; multispectral medical imaging; optical components; optical path elements; telemetry; Biomedical optical imaging; Instruments; Laser beams; Laser radar; Multispectral imaging; Optical arrays; Optical devices; Optical filters; Optical imaging; Telemetry; Adaptive optics; MEMS; MOEMS; dynamic focusing; micro-mirror arrays;
Conference_Titel :
Microelectronics, 2007. ICM 2007. Internatonal Conference on
Conference_Location :
Cairo
Print_ISBN :
978-1-4244-1846-6
Electronic_ISBN :
978-1-4244-1847-3
DOI :
10.1109/ICM.2007.4497695