• DocumentCode
    3326517
  • Title

    Adaptive MOEMS applications in telemetry and multi-spectral imaging

  • Author

    Fayek, Reda

  • Author_Institution
    Electr. & Comput. Eng., Univ. of Waterloo, Waterloo, ON
  • fYear
    2007
  • fDate
    29-31 Dec. 2007
  • Firstpage
    209
  • Lastpage
    212
  • Abstract
    Micro-opto-electro-mechanical systems (MOEMS) are finding increased uses in instrumentation and many imaging applications. The required complex optical manipulations of laser beams use expensive, sub-optimal and inaccurate optical components (lenses, mirrors, spectral filters, etc.). MOEMS components can be introduced instead of (or in addition to) these optical path elements. Such MEMS devices can significantly improve the overall performance of these instruments. We propose MOEMS elements arrays to act as adaptive and corrective optics. Alternatively, the MOEMS elements can dynamically vary the optical path structure. Initial prototypes have been built. Sample applications are introduced. They span multi-spectral medical imaging and laser radar telemetry.
  • Keywords
    laser beams; laser mirrors; micro-optomechanical devices; optical elements; optical images; telemetry; MEMS devices; adaptive MOEMS applications; complex optical manipulations; laser beams; laser radar telemetry; microoptoelectromechanical systems; multispectral medical imaging; optical components; optical path elements; telemetry; Biomedical optical imaging; Instruments; Laser beams; Laser radar; Multispectral imaging; Optical arrays; Optical devices; Optical filters; Optical imaging; Telemetry; Adaptive optics; MEMS; MOEMS; dynamic focusing; micro-mirror arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2007. ICM 2007. Internatonal Conference on
  • Conference_Location
    Cairo
  • Print_ISBN
    978-1-4244-1846-6
  • Electronic_ISBN
    978-1-4244-1847-3
  • Type

    conf

  • DOI
    10.1109/ICM.2007.4497695
  • Filename
    4497695