Title :
Gated in-situ grown carbon nanotube field emitter arrays
Author :
Hsu, David S.Y. ; Shaw, J.L.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
We fabricated two different configurations of integrally gated carbon nanotube (cNT) field emitter arrays, one with cNTs grown on the tips of gated silicon posts and the other with cNTs grown inside open gated apertures. We present emission data from both types
Keywords :
carbon nanotubes; electron field emission; vacuum microelectronics; C; gated carbon nanotube field emitter array; in situ growth; Anodes; Apertures; Carbon nanotubes; Diodes; Fabrication; Field emitter arrays; Gases; Laboratories; Silicon; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939648
