Title :
Modeling and calculation of nanostructural field emission triode characteristics
Author :
Tatarenko, N.I. ; Vorobyev, A.Y.
Author_Institution :
Aerosp. Agency, Sci. Res. Inst. of Precision Devices, Moscow, Russia
Abstract :
The technology for manufacturing field emission diodes based on nanoporous anodic alumina (AA) can be easily supplemented with a number of appropriate operations for forming grid electrodes and, finally, for creating field emission triodes (FETs). The structure of the FET consists of a regular array of uniform cylindrically shaped field emission triode cells (FETCs), the outer diameter of which is equal to that of oxide cells (OCs) of AA, and their packing density corresponds to that of OCs which can be varied ranging from 108 to 1011 OC/cm2 by selecting the appropriate anodizing regimes. To model FET characteristics of the above-mentioned structure a computer program of their analysis comprising a few stages has been developed. At the first stage the electrostatics task was solved in a single cell, that resulted in estimating describing a charge transfer process inside the triode structure were solved, and on the basis of the obtained results I-V characteristics were calculated
Keywords :
semiconductor device models; triodes; vacuum microelectronics; anodizing regimes; grid electrodes; model; nanoporous anodic alumina; nanostructural field emission triode characteristics; Anodes; Cathodes; Dielectric substrates; Electrodes; Equations; FETs; Hydrodynamics; Manufacturing; Region 8; Titanium;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939665