DocumentCode
3326883
Title
The electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode
Author
Troyan, P.E. ; Troyan, L.A. ; Saharov, Y.V.
Author_Institution
Tomsk State Univ. of Control Syst. & Radioelectronics, Russia
fYear
2001
fDate
2001
Firstpage
89
Lastpage
90
Abstract
This work tells about research of electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode. The researches were carried out on structures of Mo-SixNyOz-metal (Al, Ni, Cu, Ag, Au)
Keywords
MIM structures; aluminium; cathodes; copper; electron field emission; gold; molybdenum; nickel; silicon compounds; silver; Mo-SixNyOz-Ag; Mo-SixNyOz-Al; Mo-SixNyOz-Au; Mo-SixNyOz-Cu; Mo-SixNyOz-Ni; Mo-SixNyOz-metal; angular distribution; electron-energy distribution; metal-insulator-metal cathode; Control systems; Electrodes; Electroluminescence; Electron emission; Insulation; Metal-insulator structures; Radio control; Temperature dependence; Thickness control; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939667
Filename
939667
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