Title :
The electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode
Author :
Troyan, P.E. ; Troyan, L.A. ; Saharov, Y.V.
Author_Institution :
Tomsk State Univ. of Control Syst. & Radioelectronics, Russia
Abstract :
This work tells about research of electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode. The researches were carried out on structures of Mo-SixNyOz-metal (Al, Ni, Cu, Ag, Au)
Keywords :
MIM structures; aluminium; cathodes; copper; electron field emission; gold; molybdenum; nickel; silicon compounds; silver; Mo-SixNyOz-Ag; Mo-SixNyOz-Al; Mo-SixNyOz-Au; Mo-SixNyOz-Cu; Mo-SixNyOz-Ni; Mo-SixNyOz-metal; angular distribution; electron-energy distribution; metal-insulator-metal cathode; Control systems; Electrodes; Electroluminescence; Electron emission; Insulation; Metal-insulator structures; Radio control; Temperature dependence; Thickness control; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939667