• DocumentCode
    3326883
  • Title

    The electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode

  • Author

    Troyan, P.E. ; Troyan, L.A. ; Saharov, Y.V.

  • Author_Institution
    Tomsk State Univ. of Control Syst. & Radioelectronics, Russia
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    89
  • Lastpage
    90
  • Abstract
    This work tells about research of electron-energy distribution and angular distribution of electrons radiated by the MIM (metal-insulator-metal)-cathode. The researches were carried out on structures of Mo-SixNyOz-metal (Al, Ni, Cu, Ag, Au)
  • Keywords
    MIM structures; aluminium; cathodes; copper; electron field emission; gold; molybdenum; nickel; silicon compounds; silver; Mo-SixNyOz-Ag; Mo-SixNyOz-Al; Mo-SixNyOz-Au; Mo-SixNyOz-Cu; Mo-SixNyOz-Ni; Mo-SixNyOz-metal; angular distribution; electron-energy distribution; metal-insulator-metal cathode; Control systems; Electrodes; Electroluminescence; Electron emission; Insulation; Metal-insulator structures; Radio control; Temperature dependence; Thickness control; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
  • Conference_Location
    Davis, CA
  • Print_ISBN
    0-7803-7197-6
  • Type

    conf

  • DOI
    10.1109/IVMC.2001.939667
  • Filename
    939667