DocumentCode
3327874
Title
Experimental study on a VME pressure sensor
Author
Xia, S. ; Chen, S.
Author_Institution
Inst. of Electron., Chinese Acad. of Sci., Beijing, China
fYear
2001
fDate
2001
Firstpage
199
Lastpage
200
Abstract
In spite of its many advantages, the obstacles that baffled the rapid development and application of the VME pressure sensor have been the difficulties in its fabrication, especially in the sensor package. The authors of this paper have made systematic research on VME pressure sensors. This article presents the authors´ recent research and achievement on VME pressure sensors. A new VME pressure sensor has been successfully developed and its properties have been tested. Experimental studies and measurement results are reported, for the first time, revealing the characteristics of the sensor output current varying with applied pressure under different anode voltages
Keywords
microsensors; pressure sensors; vacuum microelectronics; VME pressure sensor; Anodes; Current measurement; Fabrication; Packaging; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Testing; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939722
Filename
939722
Link To Document