• DocumentCode
    3327874
  • Title

    Experimental study on a VME pressure sensor

  • Author

    Xia, S. ; Chen, S.

  • Author_Institution
    Inst. of Electron., Chinese Acad. of Sci., Beijing, China
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    199
  • Lastpage
    200
  • Abstract
    In spite of its many advantages, the obstacles that baffled the rapid development and application of the VME pressure sensor have been the difficulties in its fabrication, especially in the sensor package. The authors of this paper have made systematic research on VME pressure sensors. This article presents the authors´ recent research and achievement on VME pressure sensors. A new VME pressure sensor has been successfully developed and its properties have been tested. Experimental studies and measurement results are reported, for the first time, revealing the characteristics of the sensor output current varying with applied pressure under different anode voltages
  • Keywords
    microsensors; pressure sensors; vacuum microelectronics; VME pressure sensor; Anodes; Current measurement; Fabrication; Packaging; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Testing; Time measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
  • Conference_Location
    Davis, CA
  • Print_ISBN
    0-7803-7197-6
  • Type

    conf

  • DOI
    10.1109/IVMC.2001.939722
  • Filename
    939722