Gettering of gas molecules in the frit sealed glass panel by thin film metal coatings

The thin film of getter materials is deposited on 3.5×4.5 cm soda glass plate. The purpose of this study is to ascertain the feasibility of thin film getters for in situ pumping of impurity gases, known as H₂O, CO, and O₂ etc., in the field emission display (FED) panel. Zr and Ti based metal alloys are prepared by simple magnetron sputtering method. Many elements and their alloys have been tested under tight restrictions of cathode and hermetic sealing processes, i.e. acceptable activation temperature lower than 350°C to protect from cathode damage and minimizing getter degradation during sealing process. The Ti/Zr thin film getter is activated at relatively low temperature (300°C) and is shown to act as a possible in situ pump for FED