Title :
Development of in-situ laser vacuum annealing and sealing processes for an application to field emission displays
Author :
Song, B.G. ; Cha, S.N. ; Park, N.S. ; Lee, N.S. ; Kim, J.M. ; Shin, J.S. ; Lee, C.H. ; Kim, C.O. ; Hong, J.P.
Author_Institution :
FED Project Team, Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
A laser irradiation technique is increasingly becoming one of viable candidates for in-situ and in-line packaging of field emission displays (FED) in their near-future mass production. A high power laser was used for laser annealing as well as laser sealing processes. The former is to clean field emitter arrays (FEAs) and the latter is to melt glass frit between two glass plates by an local irradiation of a laser beam along the edges of a panel. In addition, seal-capping and getter activation processes were sequentially carried out while not breaking a vacuum inside a FED panel
Keywords :
field emission displays; laser beam annealing; packaging; seals (stoppers); cleaning; field emission display; field emitter array; getter activation; glass frit melting; glass plate; in-line packaging; in-situ process; laser irradiation; laser sealing; laser vacuum annealing; mass production; seal-capping; vacuum panel; Annealing; Field emitter arrays; Flat panel displays; Gettering; Glass; Laser beams; Mass production; Optical arrays; Packaging; Power lasers;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939732
