Title :
Growth and evaluation of nanostructured carbon films for triode field emitter application
Author :
Park, Kyung Ho ; Han, Hyung Jun ; Choi, Seungho ; Lee, Kyung Moon ; Lee, Soonil ; Koh, Ken Ha
Author_Institution :
Dept. of Molecular Sci. & Technol., Ajou Univ., Suwon, South Korea
Abstract :
Through the systematic investigation of the emission properties and the structure of the nanostructured carbon films, we identified the deposition condition for the most favorable film morphology for the triode-structure fabrication, which does not compromise the emission characteristics. Moreover, we realized the triode structure via the photolithography technique by taking advantage of the selectivity of nanostructured-carbon-film growth using metal catalyst
Keywords :
CVD coatings; carbon; catalysis; electron field emission; nanostructured materials; photolithography; triodes; vacuum microelectronics; C; HFCVD growth; metal catalyst; nanostructured carbon film; photolithography; triode field emitter; Anodes; Carbon dioxide; Carbon nanotubes; Circuits; Fabrication; Lithography; Moon; Morphology; Nanostructures; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939747
