Title :
The electret properties of SiO2/Al2O3 /PbO welded glass film
Author :
Huang, Zhiqiang ; Zhao, Mingzou ; Xu, Zheng ; Sha, Linzhuang
Author_Institution :
Pohl Inst. of Solid State Phys., Tongji Univ., Shanghai, China
Abstract :
The SiO2/Al2O3/PbO welded glass film is a kind of multi-component compounded film electret prepared on the wafers of single crystalline silicon through a glass-welded semiconductor technology. The experiment results show that is has excellent properties of symmetrical positive and negative electret and a good moisture-resistant ability. It can be hoped that the welded glass film will become a new kind material of inorganic film electrets
Keywords :
aluminosilicate glasses; dielectric thin films; electrets; lead compounds; moisture; surface charging; surface potential; thermally stimulated currents; Si; SiO2-Al2O3-PbO; SiO2/Al2O3/PbO welded glass film; TSD; electret properties; glass-welded semiconductor technology; inorganic film electrets; moisture-resistance; multi-component compounded film electret; single crystalline silicon; surface charging; surface potential; symmetrical negative electret; symmetrical positive electret; thermally stimulated discharge; Aluminum oxide; Corona; Electrets; Glass; Oxidation; Stability; Surface charging; Temperature; Voltage; Welding;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578062
