DocumentCode
3328527
Title
The electret properties of SiO2/Al2O3 /PbO welded glass film
Author
Huang, Zhiqiang ; Zhao, Mingzou ; Xu, Zheng ; Sha, Linzhuang
Author_Institution
Pohl Inst. of Solid State Phys., Tongji Univ., Shanghai, China
fYear
1996
fDate
25-30 Sep 1996
Firstpage
157
Lastpage
161
Abstract
The SiO2/Al2O3/PbO welded glass film is a kind of multi-component compounded film electret prepared on the wafers of single crystalline silicon through a glass-welded semiconductor technology. The experiment results show that is has excellent properties of symmetrical positive and negative electret and a good moisture-resistant ability. It can be hoped that the welded glass film will become a new kind material of inorganic film electrets
Keywords
aluminosilicate glasses; dielectric thin films; electrets; lead compounds; moisture; surface charging; surface potential; thermally stimulated currents; Si; SiO2-Al2O3-PbO; SiO2/Al2O3/PbO welded glass film; TSD; electret properties; glass-welded semiconductor technology; inorganic film electrets; moisture-resistance; multi-component compounded film electret; single crystalline silicon; surface charging; surface potential; symmetrical negative electret; symmetrical positive electret; thermally stimulated discharge; Aluminum oxide; Corona; Electrets; Glass; Oxidation; Stability; Surface charging; Temperature; Voltage; Welding;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location
Shanghai
Print_ISBN
0-7803-2695-4
Type
conf
DOI
10.1109/ISE.1996.578062
Filename
578062
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