Thin film diamond-like carbon dielectrics

Author

Wu, Richard L.C. ; Kosai, H. ; Freeman, M. ; Schwarze, G.E. ; Carr, S. Fries ; Weimer, J.A.

Author_Institution

K Syst. Corp., Beavercreek, OH, USA

fYear

2002

fDate

30 June-3 July 2002

Firstpage

282

Lastpage

285

Abstract

A prototype manufacturing technology for high energy density and high volumetric efficiency diamond-like carbon (DLC) capacitors has been demonstrated. A unique dual ion-beam deposition and web-handling system has been designed, developed and constructed. The high quality DLC films were directly deposited on the both sides of the capacitor grade aluminum foil in a continuous feed mode. The highly efficient hydrocarbon ions were produced by two 6 cm × 22 cm linear RF (13.56 MHz) inductively coupled ion sources. The dual ion gun system is housed in a class 100 clean room environment. The high performance DLC capacitors were then produced by rolling a pair of DLC-coated aluminum foils in a winding system.

Keywords

aluminium; diamond-like carbon; foils; ion beam assisted deposition; ion sources; manufacture; power capacitors; 13.56 MHz; 22 cm; 6 cm; Al; C; DLC-coated aluminum foils; capacitor grade aluminum foil; class 100 clean room environment; continuous feed mode; diamond-like carbon capacitors; dual ion gun system; dual ion-beam deposition; high energy density; high volumetric efficiency; hydrocarbon ions; linear RF inductively coupled ion sources; manufacturing technology; thin film diamond-like carbon dielectrics; web-handling system; winding system; Aluminum; Capacitors; Diamond-like carbon; Dielectric films; Dielectric thin films; Feeds; Hydrocarbons; Manufacturing; Prototypes; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Conference Record of the Twenty-Fifth International

ISSN

1076-8467

Print_ISBN

0-7803-7540-8

Type

conf

DOI

10.1109/MODSYM.2002.1189471

Filename

1189471