Title :
Study on Optical Constant of Ultrathin Aluminum Films Deposited by Molecular Beam Epitaxy
Author :
Gao Shang ; Lian Jie ; Song Ping ; Li Ping ; Ma Zheng ; Wang Xiao ; Wu Shiliang
Author_Institution :
Shandong Univ., Jinan, China
Abstract :
A set of ultrathin aluminum films (2-16nm) were deposited by molecular beam epitaxy technique. Their thickness dependence of optical properties were studied by a GES5 spectroscopic ellipsometer. The ellipsometry data were fit by using Drude and Lorenz model. Fitting results show that optical index of ultrathin aluminum films depend on the film thickness. But aluminum films with thickness of 2-3nm show different optical properties from other films.
Keywords :
aluminium; metallic epitaxial layers; molecular beam epitaxial growth; refractive index; Al; Drude-Lorenz model; GES5 spectroscopic ellipsometer; molecular beam epitaxy; optical constant; optical index; optical properties; size 2 nm to 16 nm; ultrathin aluminum films; Adaptive optics; Aluminum; Data models; Optical buffering; Optical films; Optical sensors;
Conference_Titel :
Photonics and Optoelectronics (SOPO), 2011 Symposium on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-6555-2
DOI :
10.1109/SOPO.2011.5780641
