DocumentCode
3329161
Title
IMEMS accelerometer testing-test laboratory development and usage
Author
Beegle, Richard W. ; Brocato, Robert W. ; Grant, Ronald W.
Author_Institution
Microsyst. Sci., Technol. & Components Centre, Sandia Nat. Labs., Albuquerque, NM, USA
fYear
1999
fDate
1999
Firstpage
338
Lastpage
347
Abstract
An economical IMEMS accelerometer test lab was developed by adding acceleration stimulation equipment to an IC test lab. This paper will describe an R&D approach to testing these accelerometers. Descriptions and usage of the equipment are presented. Accelerometer pulse stream data and their analysis are described. A production test facility is being developed from this work
Keywords
accelerometers; dynamic testing; microsensors; production testing; semiconductor device testing; test facilities; CMOS technology; IC test lab; IMEMS accelerometer testing; acceleration stimulation equipment; dynamic testing; integrated MEMS; positioning table; production test facility; pulse stream data; test laboratory development; Accelerometers; Clocks; Gravity; Integrated circuit testing; Laboratories; Power generation economics; Signal generators; Test equipment; Vibrations; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 1999. Proceedings. International
Conference_Location
Atlantic City, NJ
ISSN
1089-3539
Print_ISBN
0-7803-5753-1
Type
conf
DOI
10.1109/TEST.1999.805648
Filename
805648
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