Title :
Characterization and optimization of the production probing process
Author :
Quach, Minh ; Samuelson, Rich ; Shaw, David
Author_Institution :
Integrated Circuits Bus. Div., Hewlett-Packard Co., Fort Collins, CO, USA
Abstract :
In this work we illustrate a means of monitoring probing processes in-situ. In addition, we show meaningful ways of interpreting data gathered during the probing process that allow real time process modification that leads to increased yields and throughput. Through this new technique, a test operation is able to minimize yield loss due to the probing process
Keywords :
integrated circuit testing; integrated circuit yield; optimisation; production testing; voltage measurement; DELTA V test; in-situ; monitoring; online cleaning; optimization; production probing; throughput; voltage measurement; wafer; yield loss minimisation; Circuit testing; Cleaning; Current measurement; Diodes; Electrical resistance measurement; Performance evaluation; Probes; Production; Virtual reality; Voltage;
Conference_Titel :
Test Conference, 1999. Proceedings. International
Conference_Location :
Atlantic City, NJ
Print_ISBN :
0-7803-5753-1
DOI :
10.1109/TEST.1999.805652
