Title :
Design and fabrication of a novel microgripper based on electrostatic actuation
Author :
Varona, J. ; Saenz, E. ; Fiscal-Woodhouse, S. ; Hamoui, A.A.
Author_Institution :
Univ. Panamericana-Bonaterra, Mexico
Abstract :
This paper introduces a parallel-plate electrostatic microgripper fabricated in a standard surface micromachining technology. The simplicity of the design makes the gripper practical for a broad range of applications in biomedicine and microrobotics. Analytical models and experimental results are provided in support of the design.
Keywords :
electrostatic actuators; grippers; micromanipulators; analytical models; comb-drive actuator; electrostatic actuation; micromanipulator; parallel-plate electrostatic microgripper; surface micromachining; Capacitance; Electrostatic actuators; Electrothermal effects; Energy consumption; Fabrication; Grippers; Micromanipulators; Shape; Temperature; Voltage;
Conference_Titel :
Circuits and Systems, 2009. MWSCAS '09. 52nd IEEE International Midwest Symposium on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-4479-3
Electronic_ISBN :
1548-3746
DOI :
10.1109/MWSCAS.2009.5235896
