DocumentCode
3330015
Title
Excimer-lasers in an industrial fabrication line
Author
Bachmann, Friedrich G.
Author_Institution
Siemens AG
fYear
1990
fDate
4-9 Nov. 1990
Firstpage
10
Lastpage
13
Abstract
Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.
Keywords
Application software; Computer aided manufacturing; Computer industry; Integrated circuit packaging; Large-scale systems; Logistics; Manufacturing industries; Optical device fabrication; Production; Textile industry;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Conference_Location
Boston, MA, USA
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690475
Filename
690475
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