Title :
The fabrication of array wind speed and direction sensor based on Pt film
Author :
Feng Qiaohua ; Shi Yunbo ; Sun Lining
Author_Institution :
Higher Educ. Key Lab. for Meas. & Control Technol. & Instrumentations of Heilongjiang Province, Harbin Univ. of Sci. & Technol., Harbin, China
Abstract :
In order to meet the measurement requirements of the two-dimensional flow field in small-scale space, a new hot film wind speed and direction sensor based on Pt film is designed in this paper. The figure of array sensor is formed by magnetron sputtering and mechanical mask, whose process is simple and has good consistensy; the insulation groove is formed by micromachining technology, which can reduce the interaction between the heating elements and thermosensitive elements, so the power consumption is reduced, and the sensitivity is improved, the measurement of low wind speed is achieved.
Keywords :
heating elements; micromachining; microsensors; platinum compounds; power consumption; sensor arrays; sputtering; velocity measurement; Pt; array sensor; array wind speed fabrication; direction sensor; heating element; hot film wind speed; insulation groove; low wind speed measurement; magnetron sputtering; measurement requirement; mechanical mask; micromachining technology; power consumption; small scale space; thermosensitive element; two-dimensional flow field; CMOS integrated circuits; Heating; Magnetic films; Semiconductor device measurement; Sun; Temperature sensors; Pt film; array sensor; magnetron sputtering; micromachining; wind speed and direction sensor;
Conference_Titel :
Strategic Technology (IFOST), 2011 6th International Forum on
Conference_Location :
Harbin, Heilongjiang
Print_ISBN :
978-1-4577-0398-0
DOI :
10.1109/IFOST.2011.6021149
