Title :
High-current, large volume glow plasma production using pulse modulator
Author :
Takaki, Koichi ; Hasegawa, Ryuji ; Mukaigawa, Seiji ; Fujiwara, Tamiya ; Taguchi, Daichi
Author_Institution :
Iwate Univ., Japan
fDate :
30 June-3 July 2002
Abstract :
Glow discharge plasma was produced with large current up to 150 A using a pulse modulator or a capacitor discharge in dry air (N2:O2=8:2) or pure nitrogen gas. Rogowski profile electrodes having 107 mm diameter were set in the discharge chamber. The gap length of the electrodes was changed from 1 mm to 20 mm in various gas pressures 1-20 torr. The voltage-current characteristics of the glow in dry air at pressure of 10 torr was successfully obtained in wide current range from 20 mA to 150 A. The glow voltage was almost constant until the whole surface of the cathode was covered with glow, i.e., until the discharge current became 3.7 A under our experimental condition. The voltage increased with increasing current from 3.7 A. The electron density in positive column of the high-current glow discharge were obtained to be 4.9×1011 cm-3 from calculation based on swarm data. This value is close to the electron density 3×1011 cm-3 measured with Langmuir probe. The high-current glow discharge plasma was successfully produced with 35 μs duration at 1 kHz repetition rate using a pulse modulator. Temperature rise during 10 μs pulse glow discharge was obtained to almost 250 K by spectroscopic measurements.
Keywords :
Langmuir probes; cathodes; electron density; glow discharges; plasma production; pulse generators; pulsed power supplies; spectral methods of temperature measurement; 1 kHz; 1 to 20 mm; 1 to 20 torr; 10 mus; 107 mm; 150 A; 20 mA to 150 A; 250 K; 3.7 A; 35 mus; Langmuir probe; Rogowski profile electrodes; capacitor discharge; discharge chamber; dry air; electrode gap length; electron density; glow discharge plasma; high-current; high-current glow discharge; high-current glow discharge plasma; large volume glow plasma production; positive column; pulse modulator; spectroscopic measurements; swarm data; temperature rise measurement; voltage-current characteristics; Capacitors; Electrodes; Electrons; Glow discharges; Plasma measurements; Plasma temperature; Production; Pulse measurements; Pulse modulation; Voltage;
Conference_Titel :
Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Conference Record of the Twenty-Fifth International
Print_ISBN :
0-7803-7540-8
DOI :
10.1109/MODSYM.2002.1189543