Novel designs for quartz tuning fork temperature sensor

In this paper mainly describes a quartz tuning fork temperature sensor based on bending vibration. The main working components of quartz tuning fork temperature sensor are quartz tuning fork and driving circuit, according to the piezoelectric effect principle of quartz crystal, researching on correlative incentive mode, selecting cut type and setting electrodes reasonably, and applying finite element method and Matlab to simulate and analyze the vibration mode as well as temperature and frequency characteristic. The experiment proves that it doesn´t have increment error that brought by A/D converter, and it can be compatible with high speed digital systems, at the meanwhile it has high precision, low cost, small size, great developing potential. The experimental results shown that a temperature accuracy of 0.01°C and a resolution of 0.005°C within temperature range from 0°C to 100°C. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.