DocumentCode :
3330983
Title :
Methods for simultaneous measurements of topography and local electrical properties using scanning force microscopy
Author :
Sturm, H. ; Stark, W. ; Bovtoum, V. ; Schulz, E.
Author_Institution :
Fed. Inst. for Mater. Res. & Testing, Berlin, Germany
fYear :
1996
fDate :
25-30 Sep 1996
Firstpage :
223
Lastpage :
228
Abstract :
Two different approaches to investigate the local complex conductivity and the surface charge with Scanning Force Microscopy (SFM) techniques are presented. It is shown that the measurement of local electrical properties with SFM leads to interesting information about the composition of electrically heterogeneous surfaces
Keywords :
atomic force microscopy; charge measurement; electrical conductivity measurement; permittivity measurement; surface topography measurement; dielectric constant measurement; electrically heterogeneous surface composition; heterogeneous samples; local electrical properties; scanning force microscopy; surface charge; surface topography measurement; Atomic measurements; Conductivity; Current measurement; Dielectric constant; Dielectric loss measurement; Electric variables measurement; Electrostatic measurements; Microscopy; Pollution measurement; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
Type :
conf
DOI :
10.1109/ISE.1996.578073
Filename :
578073
Link To Document :
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