Title :
Methods for simultaneous measurements of topography and local electrical properties using scanning force microscopy
Author :
Sturm, H. ; Stark, W. ; Bovtoum, V. ; Schulz, E.
Author_Institution :
Fed. Inst. for Mater. Res. & Testing, Berlin, Germany
Abstract :
Two different approaches to investigate the local complex conductivity and the surface charge with Scanning Force Microscopy (SFM) techniques are presented. It is shown that the measurement of local electrical properties with SFM leads to interesting information about the composition of electrically heterogeneous surfaces
Keywords :
atomic force microscopy; charge measurement; electrical conductivity measurement; permittivity measurement; surface topography measurement; dielectric constant measurement; electrically heterogeneous surface composition; heterogeneous samples; local electrical properties; scanning force microscopy; surface charge; surface topography measurement; Atomic measurements; Conductivity; Current measurement; Dielectric constant; Dielectric loss measurement; Electric variables measurement; Electrostatic measurements; Microscopy; Pollution measurement; Surface topography;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578073
