DocumentCode
3330983
Title
Methods for simultaneous measurements of topography and local electrical properties using scanning force microscopy
Author
Sturm, H. ; Stark, W. ; Bovtoum, V. ; Schulz, E.
Author_Institution
Fed. Inst. for Mater. Res. & Testing, Berlin, Germany
fYear
1996
fDate
25-30 Sep 1996
Firstpage
223
Lastpage
228
Abstract
Two different approaches to investigate the local complex conductivity and the surface charge with Scanning Force Microscopy (SFM) techniques are presented. It is shown that the measurement of local electrical properties with SFM leads to interesting information about the composition of electrically heterogeneous surfaces
Keywords
atomic force microscopy; charge measurement; electrical conductivity measurement; permittivity measurement; surface topography measurement; dielectric constant measurement; electrically heterogeneous surface composition; heterogeneous samples; local electrical properties; scanning force microscopy; surface charge; surface topography measurement; Atomic measurements; Conductivity; Current measurement; Dielectric constant; Dielectric loss measurement; Electric variables measurement; Electrostatic measurements; Microscopy; Pollution measurement; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location
Shanghai
Print_ISBN
0-7803-2695-4
Type
conf
DOI
10.1109/ISE.1996.578073
Filename
578073
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