Practical optical waveform probing of flip-chip CMOS devices

Author

Wilsher, Kenneth R. ; Lo, William K.

Author_Institution

Schlumberger Technol., San Jose, CA, USA

fYear

1999

fDate

1999

Firstpage

932

Lastpage

939

Abstract

Internal node waveforms are recovered through the backside of flip-chip CMOS devices under real test conditions using a commercially available tool. A novel noise reduction scheme significantly reduces acquisition times by canceling environmental and laser noise. Long test loops can be examined with 10 GHz bandwidth using a 35 ps pulse width mode-locked laser source and equivalent-time-sampling. Other system issues, including phase locking the fixed 100 MHz laser clock to a variable frequency tester clock, will also be discussed

Keywords

CMOS integrated circuits; electro-optical modulation; flip-chip devices; integrated circuit testing; optical microscopy; optical phase locked loops; wave analysers; waveform analysis; 10 GHz; confocal laser scanning microscope; debugging; equivalent-time-sampling; flip-chip CMOS devices; internal node waveforms; laser clock; long test loops; noise reduction scheme; optical waveform probing; phase locking; pulse width mode-locked laser source; real test conditions; reduced acquisition time; variable frequency tester clock; Bandwidth; Clocks; Laser mode locking; Laser noise; Noise cancellation; Noise reduction; Optical devices; Optical noise; Testing; Working environment noise;

fLanguage

English

Publisher

ieee

Conference_Titel

Test Conference, 1999. Proceedings. International

Conference_Location

Atlantic City, NJ

ISSN

1089-3539

Print_ISBN

0-7803-5753-1

Type

conf

DOI

10.1109/TEST.1999.805825

Filename

805825