Title :
Continuous-Wave Electrically Injected InP/GaInAsP Equilateral-Triangle-Resonator Lasers
Author :
Yong-Zhen Huang ; Yong-hong Hu ; Qin Chen ; Shi-Jiang Wang ; Zhong-Chao Fan
Author_Institution :
Inst. of Semicond. Chinese Acad. of Sci., Beijing
Abstract :
Equilateral-triangle-resonator (ETR) microlasers with an output waveguide connected to one of the vertices of the ETR are fabricated using standard photolithography and inductively-coupled-plasma etching techniques. Continuous-wave electrically injected 1550 nm ETR laser with side length ranged from 15 to 30 mum are realized at room temperature.
Keywords :
arsenic compounds; gallium compounds; indium compounds; optical couplers; optical resonators; photolithography; semiconductor lasers; sputter etching; ETR laser; InP-GaInAsP; continuous-wave electrically injected lasers; equilateral-triangle-resonator lasers; inductively-coupled-plasma etching techniques; microlasers; photolithography; Chemical lasers; Indium phosphide; Optical resonators; Optical waveguides; Pulsed laser deposition; Pump lasers; Quantum well lasers; Semiconductor lasers; Waveguide lasers; Wet etching; Optical resonators; laser resonators; semiconductor lasers;
Conference_Titel :
Transparent Optical Networks, 2007. ICTON '07. 9th International Conference on
Conference_Location :
Rome
Print_ISBN :
1-4244-1249-8
Electronic_ISBN :
1-4244-1249-8
DOI :
10.1109/ICTON.2007.4296357
