DocumentCode
3332092
Title
Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure
Author
Hemke, T. ; Wollny, A. ; Gebhardt, M. ; Brinkmann, R.P. ; Mussenbrock, T.
Author_Institution
Theor. Electr. Eng., Ruhr-Univ. Bochum, Bochum, Germany
fYear
2010
fDate
20-24 June 2010
Firstpage
1
Lastpage
1
Abstract
Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.
Keywords
high-frequency discharges; plasma jets; plasma simulation; plasma sources; DC discharge; RF discharge; RF driven microplasma jet; atmospheric pressure; discharge configuration; display panel; light sources; microplasma sources; numerical simulation; pressure 1 atm; steriliztation; Atmospheric modeling; Atmospheric-pressure plasmas; Chemistry; Fault location; Geometrical optics; Geometry; Numerical simulation; Plasma density; Plasma devices; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location
Norfolk, VA
ISSN
0730-9244
Print_ISBN
978-1-4244-5474-7
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2010.5534160
Filename
5534160
Link To Document