Changing the behavior of parametric resonance in MEMS oscillators by tuning the effective cubic stiffness

Nonlinearity plays a critical role on the behavior of oscillators operating in the parametric resonance mode. Here, we study the effects of effective nonlinear parameter, (effective cubic stiffness), γ_3eff, on the behavior of parametric resonance in a micro electro mechanical oscillator. The value of γ_3eff can be tuned by changing the amplitude of applied voltage. Varying the sign of γ_3eff can switch bi-stable area from one side of the parametric resonance area to the other side. Both experiment and analysis show this switch and the results agree very well with each other.