• DocumentCode
    3332102
  • Title

    Changing the behavior of parametric resonance in MEMS oscillators by tuning the effective cubic stiffness

  • Author

    Zhang, Wenhua ; Baskaran, Rajashree ; Turner, K.L.

  • Author_Institution
    Dept. of Mech. & Environ. Eng., California Univ., Santa Barbara, CA, USA
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    173
  • Lastpage
    176
  • Abstract
    Nonlinearity plays a critical role on the behavior of oscillators operating in the parametric resonance mode. Here, we study the effects of effective nonlinear parameter, (effective cubic stiffness), γ3eff, on the behavior of parametric resonance in a micro electro mechanical oscillator. The value of γ3eff can be tuned by changing the amplitude of applied voltage. Varying the sign of γ3eff can switch bi-stable area from one side of the parametric resonance area to the other side. Both experiment and analysis show this switch and the results agree very well with each other.
  • Keywords
    micromechanical devices; oscillators; MEMS oscillators; effective cubic stiffness; effective nonlinear parameter; micro electro mechanical oscillator; nonlinearity; parametric resonance; Chemical technology; Electrostatics; Fingers; Micromechanical devices; Oscillators; Resonance; Springs; Switches; Tuning; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189714
  • Filename
    1189714
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3332102