DocumentCode :
3332252
Title :
A first look into plasma-plasma interaction at atmospheric pressure via numerical simulation
Author :
Wollny, Alexander ; Hemke, Torben ; Gebhardt, Markus ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter
Author_Institution :
Center for Plasma Sci. & Technol., Ruhr-Univ. Bochum, Bochum, Germany
fYear :
2010
fDate :
20-24 June 2010
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, separated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven by a sinusoidal voltage at a frequency of 10-100 kHz in atmospheric pressure Argon. Experiments performed by Schulz-von der Gathen and co-workers show strong interactions between the the micro discharges. The fundamental phenomenon is still unclear. This contribution is intended to show a first look into the modeling and simulation of micro plasma array and the plasma-plasma interaction.
Keywords :
argon; discharges (electric); plasma collision processes; plasma simulation; silicon; Ar; Si; atmospheric pressure; dielectric layer; frequency 10 kHz to 100 kHz; hollow cathode discharge; inverse pyramidal cavity; microplasma array; numerical simulation; plasma-plasma interaction; pressure 1 atm; silicon substrate; Atmospheric modeling; Atmospheric-pressure plasmas; Cathodes; Dielectric substrates; Electrodes; Frequency; Numerical simulation; Plasma simulation; Silicon; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
ISSN :
0730-9244
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
Type :
conf
DOI :
10.1109/PLASMA.2010.5534168
Filename :
5534168
Link To Document :
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