A solder self-assembled torsional micromirror array

Although numerous single micromirror designs have been demonstrated in the literature, some applications require a mirror array with the individual mirrors integrated into a single frame. This approach helps provide uniform device performance by keeping the mirror-electrode alignment and gap height constant across the array. It also provides a high optical fill-factor, which is necessary when a high power laser is distributed over an array to reduce the power incident on each mirror. Here, just such a novel, foundry fabricated, solder self-assembled micromirror array is presented.