Monolithic metal-oxide microsensor system in industrial CMOS technology

Author

Graf, M. ; Barrettino, D. ; Taschini, S. ; Hagleitner, C. ; Hierlemann, A. ; Baltes, H.

Author_Institution

Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

303

Lastpage

306

Abstract

A novel monolithic gas sensing system is presented, which includes a microhotplate and advanced analog and digital circuitry for sensor control, signal readout and communication. An innovative design of a circular-shape microhotplate has been implemented and was optimized for use with a thick film of nanocrystalline tin dioxide as sensitive layer. Post-CMOS processing steps for an electrode metalization on wafer level were developed. The integrated circuitry consists of a programmable digital temperature controller, a logarithmic converter for the sensor signal, an on-chip temperature sensor, and a standard serial interface. The detection of less than 1ppm CO has been achieved with this system in gas test measurements.

Keywords

CMOS integrated circuits; carbon compounds; gas sensors; microsensors; CO; CO detection; SnO₂; circular-shape microhotplate; electrode metalization; industrial CMOS technology; logarithmic converter; monolithic metal-oxide microsensor; nanocrystalline tin dioxide; novel monolithic gas sensing system; on-chip temperature sensor; programmable digital temperature controller; sensor control; CMOS technology; Circuits; Communication system control; Control systems; Electrical equipment industry; Gas detectors; Metals industry; Microsensors; Sensor systems; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189746

Filename

1189746