Title :
Monolithic metal-oxide microsensor system in industrial CMOS technology
Author :
Graf, M. ; Barrettino, D. ; Taschini, S. ; Hagleitner, C. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
A novel monolithic gas sensing system is presented, which includes a microhotplate and advanced analog and digital circuitry for sensor control, signal readout and communication. An innovative design of a circular-shape microhotplate has been implemented and was optimized for use with a thick film of nanocrystalline tin dioxide as sensitive layer. Post-CMOS processing steps for an electrode metalization on wafer level were developed. The integrated circuitry consists of a programmable digital temperature controller, a logarithmic converter for the sensor signal, an on-chip temperature sensor, and a standard serial interface. The detection of less than 1ppm CO has been achieved with this system in gas test measurements.
Keywords :
CMOS integrated circuits; carbon compounds; gas sensors; microsensors; CO; CO detection; SnO2; circular-shape microhotplate; electrode metalization; industrial CMOS technology; logarithmic converter; monolithic metal-oxide microsensor; nanocrystalline tin dioxide; novel monolithic gas sensing system; on-chip temperature sensor; programmable digital temperature controller; sensor control; CMOS technology; Circuits; Communication system control; Control systems; Electrical equipment industry; Gas detectors; Metals industry; Microsensors; Sensor systems; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189746
