• DocumentCode
    3332678
  • Title

    Fabrication of micro cell counter with boron diffused resistor

  • Author

    Son, Sanguk ; Choi, Yo Han ; Lee, Seung S.

  • Author_Institution
    Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    311
  • Lastpage
    314
  • Abstract
    This paper describes a novel cell counting method with a boron diffused resistor. It utilizes the photoconductive property of boron and Bio-MEMS technology. When cells shade the boron resistor from light by passing over a window, signals are generated due to the resistance changes of the boron resistor. Fabrication of two kinds of devices, having windows of silicon dioxide layer and silicon nitride membrane, and discussions on counting experiments with cells and micro beads are presented. Proposed method can be used in a micro cell counter or a LOC (Lab-on-a-chip).
  • Keywords
    cellular biophysics; micromechanical devices; microsensors; photoconductivity; B diffused resistor; Lab-on-a-chip; Si3N4; Si3N4 membrane; SiO2; SiO2 layer; bio-MEMS technology; micro cell counter; photoconductive property; resistance changes; Biomembranes; Boron; Counting circuits; Fabrication; Immune system; Lab-on-a-chip; Photoconductivity; Resistors; Signal generators; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189748
  • Filename
    1189748
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3332678