• DocumentCode
    3332729
  • Title

    CO2/H2O gas sensor using a tunable Fabry-Perot filter with wide wavelength range

  • Author

    Noro, Makoto ; Suzuki, Kentaro ; Kishi, Naoki ; Hara, Hitoshi ; Watanabe, Tetsuya ; Iwaoka, Hideto

  • Author_Institution
    Yokogawa Electr. Corp., Nagano, Japan
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    319
  • Lastpage
    322
  • Abstract
    An electrostatically driven tunable MEMS Fabry-Perot filter (FPF) with wide wavelength range from 2.5 μm to 4.5 μm has been developed for non-dispersive infrared (NDIR) CO2/H2O gas sensors. The electrostatic discharge (ESD) test and the long-term repetition-stability test were carried out for the FPF and no remarkable change of FPF performance was observed in either test. An NDIR system was equipped with the FPF, and the principle of the gas sensing method was confirmed. The resolutions defined by standard deviation are about 13 ppm for CO2 of 2000 ppm and 0.35 g/m3 for H2O Of 22.5 g/m3.
  • Keywords
    carbon compounds; electrostatic discharge; gas sensors; water; 2.5 to 4.5 micron; CO2; FPF; H2O; NDIR gas sensors; electrostatically driven tunable MEMS Fabry-Perot filter; long-term repetition-stability; Atmospheric measurements; Electromagnetic wave absorption; Electrostatic discharge; Fabry-Perot; Gas detectors; Optical filters; Pollution measurement; Testing; Voltage; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189750
  • Filename
    1189750
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3332729