Title :
Atmospheric pressure RF plasma characteristics
Author :
Gulec, A. ; Hershkowitz, N. ; Oksuz, L.
Author_Institution :
Suleyman Demirel Univ., Isparta, Turkey
Abstract :
Summary form only given. Atmospheric pressure dielectric barrier capacitively coupled rf (13.56 MHz) plasma was produced in air assisted by 5-7 1pm helium flow. A grounded 2 mm diameter copper wire placed on the axis of a glass cylinder, 3.2 cm in diameter and 22.5 cm in length. A 11.4 cm length cylindrical rf antenna was placed outside the tube. Optical emission spectroscopy (OES) and a double probe were used to determine plasma characteristics. A glow region like crescent shape was observed around grounded electrode by an ICCD (intensified charge-coupled device) camera. N2 molecular vibrational lines and helium, oxygen, hydrogen and argon atomic lines were observed. The electron temperature was calculated as 701-1065K via the Boltzmann plot method from the helium lines.
Keywords :
air; antennas in plasma; helium; high-frequency discharges; plasma flow; plasma probes; plasma production; plasma temperature; Boltzmann plot method; He; atmospheric pressure rf plasma characteristics; atomic lines; capacitively coupled rf plasma; cylindrical rf antenna; electron temperature; frequency 13.56 MHz; helium flow; intensified charge-coupled device camera; molecular vibrational lines; optical emission spectroscopy; plasma production; size 11.4 cm; size 2 mm; size 22.5 cm; size 3.2 cm; Atmospheric-pressure plasmas; Atom optics; Copper; Dielectrics; Glass; Helium; Plasma properties; Plasma temperature; Radio frequency; Wire;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534326
