• DocumentCode
    333561
  • Title

    Integrating simulation based scheduling with MES in a semi-conductor fab

  • Author

    Watt, Douglas G.

  • Author_Institution
    AutoSimulations Inc., Bountiful, UT, USA
  • Volume
    2
  • fYear
    1998
  • fDate
    13-16 Dec 1998
  • Firstpage
    1713
  • Abstract
    This paper discusses how simulation was used to evaluate and characterize the scheduling issues in a semiconductor fab and the subsequent implementation of an integrated scheduling solution. The scheduling system was integrated with the fab MES and a number of other data sources including an integrated machine standards database, preventative maintenance scheduling and a Kanban stage calculation worksheet. It generates the schedule automatically at intervals throughout the day, 7 days per week and is used directly by the shop floor operators. The solution enables the same data to be used for both scheduling and off-line simulation to provide continuous improvement by refining the simulation rules through “what-if” analysis
  • Keywords
    computer aided production planning; digital simulation; production control; scheduling; semiconductor device manufacture; Kanban stage calculation worksheet; MES; data sources; integrated machine standards database; preventative maintenance scheduling; semiconductor fabrication; shop floor operators; simulation based scheduling; Analytical models; Databases; Drives; Enterprise resource planning; Job shop scheduling; Measurement; Medical simulation; Preventive maintenance; Production facilities; Routing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation Conference Proceedings, 1998. Winter
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-5133-9
  • Type

    conf

  • DOI
    10.1109/WSC.1998.746052
  • Filename
    746052