Title :
Silicon-based ultrasonic surgical actuators
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
fDate :
29 Oct-1 Nov 1998
Abstract :
A novel ultrasonic biomedical actuator technology fabricated using micromachining and piezoelectric ceramics is presented. Advantages and limitations of micromachining technology in the context of biomedical actuators are outlined. Micromachining allows the fabrication of extremely small devices with integrated electronics. Silicon´s material properties make it ideal for high-intensity ultrasonic applications. Cutting tip velocity and sharpness were shown to be superior to that of conventional ultrasonic surgical tool technology
Keywords :
actuators; biomedical equipment; biomedical ultrasonics; micromachining; piezoceramics; silicon; surgery; ultrasonic devices; Si; biomedical actuators; cutting tip sharpness; cutting tip velocity; extremely small devices fabrication; integrated electronics; medical instrumentation; micromachining technology; piezoelectric ceramics; silicon-based ultrasonic surgical actuators; Actuators; Etching; Focusing; Frequency; Micromachining; Silicon; Surgery; Surges; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Engineering in Medicine and Biology Society, 1998. Proceedings of the 20th Annual International Conference of the IEEE
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-5164-9
DOI :
10.1109/IEMBS.1998.746062
