Title :
Future prospects for Si CMOS technology
Author :
Frank, D.J. ; Yuan Taur ; Hen-Sum Philip Wong
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
Si CMOS technology has steadily grown in importance for the past 30 years until it is now the dominant logic technology in the electronics industry. This talk will briefly describe the current state of Si CMOS and will then concentrate on where it appears to be headed in the next decade or so.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated circuit technology; silicon; technological forecasting; Si; Si CMOS technology; future developments; CMOS technology; Doping profiles; FETs; Implants; Insulation; Microprocessors; Random access memory; Surface resistance; Threshold voltage; Tunneling;
Conference_Titel :
Device Research Conference Digest, 1999 57th Annual
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-5170-3
DOI :
10.1109/DRC.1999.806308
