DocumentCode
3335643
Title
Future prospects for Si CMOS technology
Author
Frank, D.J. ; Yuan Taur ; Hen-Sum Philip Wong
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
1999
fDate
23-23 June 1999
Firstpage
18
Lastpage
21
Abstract
Si CMOS technology has steadily grown in importance for the past 30 years until it is now the dominant logic technology in the electronics industry. This talk will briefly describe the current state of Si CMOS and will then concentrate on where it appears to be headed in the next decade or so.
Keywords
CMOS integrated circuits; elemental semiconductors; integrated circuit technology; silicon; technological forecasting; Si; Si CMOS technology; future developments; CMOS technology; Doping profiles; FETs; Implants; Insulation; Microprocessors; Random access memory; Surface resistance; Threshold voltage; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference Digest, 1999 57th Annual
Conference_Location
Santa Barbara, CA, USA
Print_ISBN
0-7803-5170-3
Type
conf
DOI
10.1109/DRC.1999.806308
Filename
806308
Link To Document