Title :
Challenges and solutions for EEDF extraction from cylindrical langmuir probes
Author :
El Saghir, Ahmed ; Shannon, Steven
Author_Institution :
North Carolina State Univ., Raleigh, NC, USA
Abstract :
One of the most valuable plasma characteristics that can be obtained from a Langmuir probe is the Electron Energy Distribution Function (EEDF). Due to the integral relationship between the probe VI characteristic and the EEDF, it is also one of the most challenging aspects of Langmuir probe analysis.
Keywords :
Langmuir probes; plasma temperature; Langmuir probe analysis; cylindrical Langmuir probes; electron energy distribution function; electron temperature extraction; plasma characteristics; Distribution functions; Electrons; Filtering; Filters; Information geometry; Plasma properties; Plasma temperature; Probes; Smoothing methods; Temperature distribution;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534404
