• DocumentCode
    3335861
  • Title

    Initial laser induced fluorescence measurements in the madhex expansion chamber and electron temperature scaling with pulsed RF power

  • Author

    Wiebold, Matt ; Scharer, John

  • Author_Institution
    Univ. of Wisconsin-Madison, Madison, WI, USA
  • fYear
    2010
  • fDate
    20-24 June 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    A flowing argon helicon plasma is formed in a 10 cm diameter, 1.5 m long Pyrex chamber with an axial magnetic field in nozzle or flat configuration, variable up to 1 kG in the source region. A new expansion chamber has been constructed and initial laser induced fluorescence (LIF) results including ion velocities and temperatures are presented. Microwave interferometry (105 GHz), collisional radiative spectroscopic codes and diamagnetic loops are used to measure electron density and temperature during pulsed (5 ms) RF operation. Calculated variation of the RF frequency (from 12 MHz to 15 MHz) during the pulse allows for low (<;3%) reflected powers during the gas breakdown and the approach to and formation of the steady state plasma. The scaling of electron temperature with RF power is also examined for high (>3 kW) RF powers. The effect of different flow rates, magnetic field expansion variation and pressures are measured to observe the variation of the ion distribution function via LIF and the axial variation of acceleration due to neutral depletion. Possible double layer creation and sustainment in the downstream (relative to the RF antenna) transition to the expansion chamber is also examined at low flow rates and high RF powers.
  • Keywords
    argon; discharges (electric); plasma collision processes; plasma density; plasma diagnostics; plasma magnetohydrodynamics; plasma sheaths; plasma simulation; plasma temperature; plasma transport processes; Ar; Madhex expansion chamber; Pyrex chamber; RF antenna; RF frequency; argon helicon plasma flow; axial magnetic field; collisional radiative spectroscopic codes; diamagnetic loops; double layer creation; electron density; electron temperature scaling; frequency 105 GHz; frequency 12 MHz to 15 MHz; gas breakdown; initial laser induced fluorescence measurement; ion distribution function; ion temperature; ion velocity; microwave interferometry; neutral depletion; pulsed RF power; size 1.5 cm; size 10 cm; steady state plasma; Electrons; Fluorescence; Magnetic field measurement; Optical pulses; Plasma measurements; Plasma temperature; Power lasers; Power measurement; Pulse measurements; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2010 Abstracts IEEE International Conference on
  • Conference_Location
    Norfolk, VA
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-5474-7
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2010.5534414
  • Filename
    5534414