DocumentCode :
3336092
Title :
Silicon quantum dots in a MOSFET structure: level structure
Author :
Khoury, M. ; Gunther, A. ; Rack, M.J. ; Pivin, D.P., R. ; Ferry, D.K.
Author_Institution :
Center for Solid State Electron. Res., Arizona State Univ., Tempe, AZ, USA
fYear :
1999
fDate :
23-23 June 1999
Firstpage :
82
Lastpage :
83
Abstract :
We have fabricated silicon quantum dot devices based on a dual gate technique in a silicon MOS technology. Two lateral gates deplete the inversion layer which is induced by a top gate, thus forming a quantum dot. Hence, the dot is located between the source and drain of a long channel MOSFET. Here, we report on the dependence of the charging of the dot with variation in the top gate, as well as a study of the magnetic field effect on the energy level structure.
Keywords :
MOSFET; elemental semiconductors; inversion layers; quantum well devices; semiconductor quantum dots; silicon; Si; dual gate MOSFET; energy level structure; inversion layer; magnetic field; silicon quantum dot device; Electrons; Energy states; Gallium arsenide; MOSFET circuits; Magnetic confinement; Magnetic fields; Plasma temperature; Quantum dots; Silicon; US Department of Transportation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference Digest, 1999 57th Annual
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-5170-3
Type :
conf
DOI :
10.1109/DRC.1999.806332
Filename :
806332
Link To Document :
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