Development of micromachined electrochemical sensor and portable meter system

An integrated microsensor has been designed and developed by using standard semiconductor technology and post-processing by micromachined procedures. The microsensor is implemented by using the UMC 0.5 μ CMOS technology with a die size of 1.0 mm×1.0 mm. The microsensor consists of a two-electrode electrochemical cell, current-to-voltage converter and operational amplifier. The electrode area is 600 μ×800 μ. The complete system contains a microsensor strip, a single chip microprocessor (80C196KC) and a LCD for portable instrument prototype. The system is capable of both amperometric and cyclic voltametric measurement for continuous monitoring and detail analysis of electrode response