DocumentCode :
3336240
Title :
Growth and applications of nanotube films
Author :
Kuttel, O.M. ; Dessibourg, O. ; Groning, O. ; Maillard, E. ; Nilsson, L.O. ; Schlapbach, L.
Author_Institution :
Inst. de Phys., Fribourg Univ., Switzerland
fYear :
1999
fDate :
23-23 June 1999
Firstpage :
120
Lastpage :
123
Abstract :
We have presented a method to produce carbon nanotube films by microwave plasma enhanced CVD deposition and have characterised their electron field emission by different techniques. First devices made out of these films reveal that even though the emission is understood in terms of the underlying physics more effort has to be put in the technology to get uniform emitting films, with a narrow field enhancement factor distribution and a controlled internal resistor being stable in time. By using a hot filament reactor we were able to uniformly cover 4" wafers with nanotubes. Structured and patterned nanotube films have been grown and characterised with respect to their field emission properties and their use for cold electron sources.
Keywords :
carbon nanotubes; electron field emission; plasma CVD coatings; C; carbon nanotube film; cold electron source; electron field emission; hot filament reactor; microwave plasma enhanced CVD deposition; Carbon nanotubes; Electron emission; Electron sources; Inductors; Microwave devices; Microwave theory and techniques; Physics; Plasma applications; Plasma devices; Resistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference Digest, 1999 57th Annual
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-5170-3
Type :
conf
DOI :
10.1109/DRC.1999.806344
Filename :
806344
Link To Document :
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