Title :
A thin-film strain gauge tactile sensor array for robots
Author :
Minbang, Lin ; Heping, Kong
Author_Institution :
Dept. of Precision Instrum., Jiao Tong Univ., Shanghai, China
Abstract :
A novel 3-D tactile sensor array employing thin-film strain gauge deposited on an aluminum alloy substrate is described. The construction details of the tactile sensor array are given. The process of depositing the insulating layers, sensing film, the protective overlayer and other related aspects are presented. This kind of sensor using microfabrication technology has a very promising prospect for tactile sensing of robots.<>
Keywords :
electric sensing devices; robots; strain gauges; tactile sensors; thin film devices; AlCuMg/sub 2/; LY12; Si/sub 3/N/sub 4/-Al/sub 2/O/sub 3/-AlCuMg/sub 2/; aluminum alloy substrate; insulating layers; microfabrication technology; protective overlayer; robots; sensing film; thin-film strain gauge tactile sensor array; Aluminum alloys; Capacitive sensors; Insulation; Protection; Robot sensing systems; Sensor arrays; Sputtering; Substrates; Tactile sensors; Thin film sensors;
Conference_Titel :
Advanced Robotics, 1991. 'Robots in Unstructured Environments', 91 ICAR., Fifth International Conference on
Conference_Location :
Pisa, Italy
Print_ISBN :
0-7803-0078-5
DOI :
10.1109/ICAR.1991.240353
