Analysis and Design of Linear Parallel Compliant Stage for Ultra-precision Motion Based on 4-PP Flexural joint Mechanism

Author

Choi, Kee-Bong ; Lee, Jae Jong

Author_Institution

Nano-Mech. Syst. Res. Div., Korea Inst. of Machinery & Mater., Seoul

fYear

2008

fDate

9-11 April 2008

Firstpage

35

Lastpage

38

Abstract

A linear parallel compliant XY-stage for ultra-precision motion is proposed. The prismatic joints of the compliant stage are implemented by three kinds of flexural joints. Among the flexural joints, a modified double compound linear flexural joint has the function of linear motion guide and displacement amplification so that the compliant mechanism has compact structure. The parallel linear compliant mechanism is analyzed, designed, machined by wire electric discharge machining, and then integrated with stack type piezoelectric elements for driving forces and capacitance-type displacement sensors into an ultra-precision stage for 2-DOF linear motions. Experiments demonstrate the characteristics of the ultra-precision stage implemented by the compliant mechanism.

Keywords

bending strength; electrical discharge machining; force sensors; joining processes; piezoelectric materials; piezoelectricity; precision engineering; wires; capacitance-type displacement sensors; flexural joint mechanism; force sensors; linear parallel compliant XY-stage; stack type piezoelectric element; ultra-precision motion; wire electric discharge machining; Capacitance; Capacitive sensors; Joining materials; Machinery; Machining; Manufacturing; Motion analysis; Probes; Sensor phenomena and characterization; Wire; Selected kewords relevant to the subject;

fLanguage

English

Publisher

ieee

Conference_Titel

Smart Manufacturing Application, 2008. ICSMA 2008. International Conference on

Conference_Location

Gyeonggi-do

Print_ISBN

978-89-950038-8-6

Electronic_ISBN

978-89-962150-0-4

Type

conf

DOI

10.1109/ICSMA.2008.4505608

Filename

4505608