Operational amplifier based test structure for transistor threshold voltage variation

Author

Ji, BrainL ; Pearson, Dale J. ; Lauer, Iassc ; Stellari, Franco ; Frank, David J. ; Chang, Leland ; Ketchen, Mark B.

Author_Institution

IBM T. J. Watson Res. Center, Yorktown Heights, NY

fYear

2008

fDate

24-27 March 2008

Firstpage

3

Lastpage

7

Abstract

A new test structure has been developed, which is comprised of MOSFET arrays and an on-chip operational amplifier feedback loop for measuring threshold voltage variation. The test structure also includes an on-chip clock generator and address decoders to scan through the arrays. It can be used in an inline test environment to provide rapid assessment of Vt variation for technology development and chip manufacturing. Hardware results in a 65 nm technology are presented.

Keywords

MOSFET; operational amplifiers; testing; MOSFET array; metal-oxide-semiconductor field effect transistor; on-chip clock generator; on-chip operational amplifier feedback loop; operational amplifier based test structure; size 65 nm; transistor threshold voltage variation; Clocks; Decoding; Feedback loop; MOSFET circuits; Manufacturing; Operational amplifiers; Semiconductor device measurement; Testing; Threshold voltage; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2008. ICMTS 2008. IEEE International Conference on

Conference_Location

Edinburgh

Print_ISBN

978-1-4244-1800-8

Electronic_ISBN

978-1-4244-1801-5

Type

conf

DOI

10.1109/ICMTS.2008.4509305

Filename

4509305