Title :
Operational amplifier based test structure for transistor threshold voltage variation
Author :
Ji, BrainL ; Pearson, Dale J. ; Lauer, Iassc ; Stellari, Franco ; Frank, David J. ; Chang, Leland ; Ketchen, Mark B.
Author_Institution :
IBM T. J. Watson Res. Center, Yorktown Heights, NY
Abstract :
A new test structure has been developed, which is comprised of MOSFET arrays and an on-chip operational amplifier feedback loop for measuring threshold voltage variation. The test structure also includes an on-chip clock generator and address decoders to scan through the arrays. It can be used in an inline test environment to provide rapid assessment of Vt variation for technology development and chip manufacturing. Hardware results in a 65 nm technology are presented.
Keywords :
MOSFET; operational amplifiers; testing; MOSFET array; metal-oxide-semiconductor field effect transistor; on-chip clock generator; on-chip operational amplifier feedback loop; operational amplifier based test structure; size 65 nm; transistor threshold voltage variation; Clocks; Decoding; Feedback loop; MOSFET circuits; Manufacturing; Operational amplifiers; Semiconductor device measurement; Testing; Threshold voltage; Voltage measurement;
Conference_Titel :
Microelectronic Test Structures, 2008. ICMTS 2008. IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4244-1800-8
Electronic_ISBN :
978-1-4244-1801-5
DOI :
10.1109/ICMTS.2008.4509305
