Title :
Crystalline thin-film Si cells from layer transfer using porous Si (PSI-process)
Author :
Brendel, R. ; Auer, R. ; Feldrapp, K. ; Scholten, D. ; Steinhof, M. ; Hezel, R. ; Schulz, M.
Author_Institution :
Bavarian Center for Appl. Energy Res., Erlangen, Germany
Abstract :
We fabricate thin-film Si cells by photolithography-free layer transfer processes. The confirmed power conversion efficiency of a 25.5 μm-thick cell that is textured with random upright pyramids is 15.4 %. Upright pyramids are, however, difficult to form in ultra-thin Si films. We therefore introduce an alternative process that yields random inverted pyramids on the front surface without chemical etching of the thin epitaxial film. This novel process applies an epitaxial emitter to speed up the fabrication process when compared to a thermally diffused emitter.
Keywords :
CVD coatings; elemental semiconductors; porous semiconductors; semiconductor epitaxial layers; semiconductor growth; silicon; solar cells; surface texture; vapour phase epitaxial growth; 15.4 percent; 25.5 micron; Si; crystalline thin-film Si cells; epitaxial emitter; front surface; layer transfer; photolithography-free layer transfer processes; porous Si; power conversion efficiency; random upright pyramids; thin epitaxial film; Absorption; Chemical vapor deposition; Crystallization; Epitaxial growth; Etching; Optical surface waves; Semiconductor films; Semiconductor thin films; Silicon; Substrates;
Conference_Titel :
Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
Print_ISBN :
0-7803-7471-1
DOI :
10.1109/PVSC.2002.1190462